Fabrication of conductive micro electrodes in diamond bulk using pulsed Bessel beams

High-quality, in-bulk conductive graphitic microelectrodes are fabricated perpendicular to the surface of a 500 μm thick monocrystalline CVD diamond sample using pulsed Bessel beams. With 12o cone angle beam, different pulse parameters explored optimize wires which written without translation. The quality electrodes and their electrical structural properties have been analysed through current-voltage characterization micro-Raman spectroscopy. We found that higher duration favours better conductivity while energy has an optimum value for same. This trend is confirmed by presence amounts graphitic-like sp2 bonded carbon revealed spectra in configurations. Using suitable writing parameters, we able create with resistivity 0.04 Ω cm, which, best our knowledge, one lowest values ever reported literature case laser micromachining.